Free access article

Microsc. Microanal. Microstruct. 2, 203-213 (1991)
DOI: 10.1051/mmm:0199100202-3020300

Factors affecting the accuracy of elemental analysis by transmission EELS

Raymond F. Egerton

Department of Materials Science and Engineering, State University of New York, Stony Brook, NY 11794, U.S.A.

Abstract
The accuracy of elemental analysis by electron energy-loss spectroscopy depends on many factors, such as the concentration of the elements being analysed and the energies of the corresponding ionization edges. We discuss sources of inaccuracy in the acquisition and analysis of spectra, in the quantification procedure and in the required ionization cross sections, together with procedures for minimising these errors.

PACS
0781 - Electron and ion spectrometers.
6837L - Transmission electron microscopy (TEM) (including STEM, HRTEM, etc.).
0705K - Data analysis: algorithms and implementation; data management.

Key words
EEL spectroscopy -- Chemical composition -- Yttrium oxides -- Barium oxide -- Copper oxide -- Measurement errors -- Cross sections -- Ionization -- Ionization edge


© EDP Sciences 1991